Processing laboratory

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In our processing laboratory we have access to sputtering machines for deposition of metals and dielectrics (AJA Orian 5, Cressington 208HR), a mask aligner (Zeuss MJB4), a surface profiler (KLA Tencor P6), a spin coater (Laurel WS650-23) and a microplotter (GIX Microplotter II), which are used for fabrication and characterization of integrated optical systems and related applications.